Plasma-Therm - Tegal™ Etch Systems (Cassette-to-Cassette)
Tegal etch systems are industry proven cassette-to-cassette platforms for volume manufacturing.
Plasma-Therm’s Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.
- In addition, Plasma-Therm® also support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.
Tegal etch systems are industry proven cassette-to-cassette platforms for volume manufacturing.
Plasma-Therm’s Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.
- In addition, Plasma-Therm® also support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.
Tegal etch systems are industry proven cassette-to-cassette platforms for volume manufacturing.
Plasma-Therm’s Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.
- In addition, Plasma-Therm® also support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.
This equipment is advertised on behalf of Plasma-Therm LLC